Effects of Dopants on Scratch Responses of Diamond-Like Carbon Films by Rockwell C Diamond Indenter - Details

author：

Liu, Ming (Liu, Ming.) ^[1] (Scholars：刘明) | Xu, Zhitong (Xu, Zhitong.) ^[2] | Zhang, Guangan (Zhang, Guangan.) ^[3]

Indexed by：

EI Scopus SCIE

Abstract：

Micro-scratch　responses　of　diamond-like　carbon　(DLC)　films　deposited　with　different　dopants　(i.e.,　Si,　Cr,　and　H)　were　investigated　by　Rockwell　C　diamond　indenter　under　progressive　normal　load　linearly　increasing　from　5　mN　to　15　N.　Three　critical　loads　can　be　identified　from　residual　scratch　morphology　according　to　different　periodic　and　symmetrical　damage　patterns.　The　results　under　small　loads　show:　The　addition　of　H　can　enhance　normal　contact　and　residual　hardness　of　DLC　films.　Fracture　toughness　of　both　film　and　film/substrate　system　can　be　quantified　by　scratch-based　linear　elastic　fracture　mechanics.　H-DLC　film　exhibits　the　smallest　fracture　toughness,　and　Si-DLC　and　Cr-DLC　films　have　larger　fracture　toughness　and　critical　loads　than　pure　DLC　film.

Keyword：

critical loads DLC films effects of dopants fracture micro-scratch Rockwell C indenter

Community：

[ 1 ] [Liu, Ming]Fuzhou Univ, Fujian Prov Key Lab Terahertz Funct Devices & Int, Sch Mech Engn & Automat, Qishan Campus, Fuzhou 350116, Fujian, Peoples R China
[ 2 ] [Xu, Zhitong]Fuzhou Univ, Fujian Prov Key Lab Terahertz Funct Devices & Int, Sch Mech Engn & Automat, Qishan Campus, Fuzhou 350116, Fujian, Peoples R China
[ 3 ] [Zhang, Guangan]Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[ 4 ] [Zhang, Guangan]Gansu Acad Sci, Inst Nanomat Applicat Technol, Lanzhou 730000, Peoples R China
[ 5 ] [Zhang, Guangan]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China