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Abstract:
Micro-scratch responses of diamond-like carbon (DLC) films deposited with different dopants (i.e., Si, Cr, and H) were investigated by Rockwell C diamond indenter under progressive normal load linearly increasing from 5 mN to 15 N. Three critical loads can be identified from residual scratch morphology according to different periodic and symmetrical damage patterns. The results under small loads show: The addition of H can enhance normal contact and residual hardness of DLC films. Fracture toughness of both film and film/substrate system can be quantified by scratch-based linear elastic fracture mechanics. H-DLC film exhibits the smallest fracture toughness, and Si-DLC and Cr-DLC films have larger fracture toughness and critical loads than pure DLC film. © 2022, ASM International.
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Journal of Materials Engineering and Performance
ISSN: 1059-9495
Year: 2023
Issue: 13
Volume: 32
Page: 6092-6106
2 . 2
JCR@2023
2 . 2 0 0
JCR@2023
ESI HC Threshold:49
JCR Journal Grade:3
CAS Journal Grade:4
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 4
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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