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author:

Chen, He (Chen, He.) [1] | Lv, Peiwen (Lv, Peiwen.) [2] | Peng, Kai (Peng, Kai.) [3] | Li, Pengkun (Li, Pengkun.) [4] | Ji, Nanzheng (Ji, Nanzheng.) [5] | Wang, Lilin (Wang, Lilin.) [6] | Xue, Difei (Xue, Difei.) [7] | Chen, Chenlong (Chen, Chenlong.) [8]

Indexed by:

EI Scopus SCIE

Abstract:

Wide band gap semiconductor beta-Ga2O3 thin film is widely used in photodetectors. Along the beta-Ga2O3 [102] direction, the lattice mismatch between ((2) over bar 01) beta-Ga2O3 and (111) SrTiO3 (STO) is approximately 2.4 %. STO can be used as a substrate for heterostructure fabrication. Here, taking advantage of the symmetry and interatomic super-cellular matching between beta-Ga2O3 and the STO substrate, beta-Ga2O3 epitaxial films were cultivated on STO (111) substrates via an LPCVD technique. Photoconductive solar blind ultraviolet (UV) detectors have been fabricated based on cultivated Ga2O3 thin films, and the intrinsic linkage of the detector performance with temperature variation has been analyzed in detail. The composition, surface morphology and electrical properties of the films were characterized. The optimized device showed a response rate of 66.64 A/W. The fast rise time (tau(r1)/tau(r2)) and decay time (tau(d1)/tau(d2)) at 20 V bias were 0.15 s/0.18 s and 0.20 s/0.25 s, respectively, with the detectivity of 4.1x10(12) Jones.

Keyword:

beta-Ga2O3 High-performance Low-pressure chemical vapor deposition Responsivity Solar-blind photodetector

Community:

  • [ 1 ] [Chen, He]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China
  • [ 2 ] [Li, Pengkun]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China
  • [ 3 ] [Ji, Nanzheng]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China
  • [ 4 ] [Wang, Lilin]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China
  • [ 5 ] [Xue, Difei]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China
  • [ 6 ] [Chen, Chenlong]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China
  • [ 7 ] [Chen, He]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 8 ] [Lv, Peiwen]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 9 ] [Li, Pengkun]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 10 ] [Ji, Nanzheng]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 11 ] [Wang, Lilin]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 12 ] [Xue, Difei]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 13 ] [Chen, Chenlong]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China
  • [ 14 ] [Chen, He]Fuzhou Univ, Coll Chem, Fuzhou 350108, Fujian, Peoples R China
  • [ 15 ] [Peng, Kai]Fuzhou Univ, Coll Chem, Fuzhou 350108, Fujian, Peoples R China
  • [ 16 ] [Ji, Nanzheng]Fuzhou Univ, Coll Chem, Fuzhou 350108, Fujian, Peoples R China

Reprint 's Address:

  • [Chen, Chenlong]Chinese Acad Sci, Fujian Inst Res Struct Matter, Key Lab Optoelect Mat Chem & Phys, Fuzhou 350002, Peoples R China;;[Lv, Peiwen]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China;;[Chen, Chenlong]Univ Chinese Acad Sci, Fujian Coll, Fuzhou 350002, Peoples R China;;

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Source :

VACUUM

ISSN: 0042-207X

Year: 2024

Volume: 226

3 . 8 0 0

JCR@2023

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 3

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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