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Wide band gap semiconductor beta-Ga2O3 thin film is widely used in photodetectors. Along the beta-Ga2O3 [102] direction, the lattice mismatch between ((2) over bar 01) beta-Ga2O3 and (111) SrTiO3 (STO) is approximately 2.4 %. STO can be used as a substrate for heterostructure fabrication. Here, taking advantage of the symmetry and interatomic super-cellular matching between beta-Ga2O3 and the STO substrate, beta-Ga2O3 epitaxial films were cultivated on STO (111) substrates via an LPCVD technique. Photoconductive solar blind ultraviolet (UV) detectors have been fabricated based on cultivated Ga2O3 thin films, and the intrinsic linkage of the detector performance with temperature variation has been analyzed in detail. The composition, surface morphology and electrical properties of the films were characterized. The optimized device showed a response rate of 66.64 A/W. The fast rise time (tau(r1)/tau(r2)) and decay time (tau(d1)/tau(d2)) at 20 V bias were 0.15 s/0.18 s and 0.20 s/0.25 s, respectively, with the detectivity of 4.1x10(12) Jones.
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VACUUM
ISSN: 0042-207X
Year: 2024
Volume: 226
3 . 8 0 0
JCR@2023
Cited Count:
SCOPUS Cited Count: 3
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 2
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