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author:

Wang, Xue-Yan (Wang, Xue-Yan.) [1] | Guo, Cheng-Long (Guo, Cheng-Long.) [2] | Zhou, Yi-Jian (Zhou, Yi-Jian.) [3] | Zhu, Xue-Qi (Zhu, Xue-Qi.) [4] | Yan, Zhi-Bing (Yan, Zhi-Bing.) [5] | Li, Yang (Li, Yang.) [6] | Yang, Tian-Xi (Yang, Tian-Xi.) [7] | Sun, Jie (Sun, Jie.) [8] (Scholars:孙捷) | Yan, Qun (Yan, Qun.) [9]

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EI Scopus

Abstract:

In this paper, an AlGaInP-based red Micro-LED display measured 17.78 mm (0.7 in), with a resolution of 1920 × 1080, a light-emitting mesa size of 6 μm, a pixel pitch of 8 μm and a pixel density of 3175 PPI was designed and fabricated with a CMOS driver backplane. The metal bump preparation technology of the complementary metal-oxide semiconductor driver backplane was optimized to enhance the bonding yield and create an optimal display effect. Improper sizing of the etched window in the SiO2 insulation and passivation layer can have a detrimental impact on the metal bump preparation and subsequent bonding process. By optimizing the settings of lithography and dry etching, the appropriate size of the etched aperture in the passivation layer was achieved. The high density, small size, and large aspect ratio of the photoresist openings for the bump fabrication made it challenging to remove the photoresist following the metal evaporation. To successfully remove the photoresist, it is important to carefully choose suitable experimental conditions for the removal. Afterwards, an 8 μm AlGaInP-based red Micro-LED display was effectively integrated with complementary metal-oxide semiconductor using flip-chip bonding technology. This work may be of reference value to those who work on ultrahigh density red Micro-LEDs that is challenging but crucial for future full color micro displays. © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.

Keyword:

CMOS integrated circuits Dry etching Flip chip devices Gallium nitride Gallium phosphide Gluing Indium phosphide MOSFET devices Organoclay Photoresists Semiconducting indium phosphide Semiconducting silicon compounds Silicon wafers

Community:

  • [ 1 ] [Wang, Xue-Yan]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 2 ] [Guo, Cheng-Long]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 3 ] [Zhou, Yi-Jian]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 4 ] [Zhu, Xue-Qi]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 5 ] [Yan, Zhi-Bing]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 6 ] [Li, Yang]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 7 ] [Yang, Tian-Xi]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 8 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 9 ] [Sun, Jie]Quantum Device Physics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg; 41296, Sweden
  • [ 10 ] [Yan, Qun]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China

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Source :

Engineering Research Express

Year: 2024

Issue: 4

Volume: 6

1 . 5 0 0

JCR@2023

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

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Chinese Cited Count:

30 Days PV: 2

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