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author:

Li, Yang (Li, Yang.) [1] | Zhang, Kaixin (Zhang, Kaixin.) [2] | Zhi, Ting (Zhi, Ting.) [3] | Tao, Tao (Tao, Tao.) [4] | Huang, Chunlei (Huang, Chunlei.) [5] | Nie, Junyang (Nie, Junyang.) [6] | Yang, Tianxi (Yang, Tianxi.) [7] | Zhou, Yijian (Zhou, Yijian.) [8] | Huang, Zhonghang (Huang, Zhonghang.) [9] | Lu, Yu (Lu, Yu.) [10] | Luo, Canlin (Luo, Canlin.) [11] | Yan, Qun (Yan, Qun.) [12] | Sun, Jie (Sun, Jie.) [13] | Guo, Tailiang (Guo, Tailiang.) [14]

Indexed by:

EI

Abstract:

Micro light-emitting diode (Micro-LED) displays have been considered promising candidate for reaching the augmented/virtual reality (AR/VR) display technology. However, it's challenging to attain the display application with ultra-high PPI (pixel per inch) and larger panel size in virtue of the difficulties of chip fabrication and subsequent bonding process. In this paper, we demonstrated a 0.7-inch active-matrix (AM) monolithic blue Micro-LED display integrated with silicon-based complementary metal oxide semiconductor (CMOS) driver by indium bump bonding. The display features a full high-definition (FHD) resolution of 1920 × 1080, a pixel pitch of 8 μm, and a PPI of 3175. Key fabrication processes were investigated experimentally including self-alignment etching of mesa, elevation of the cathode to match the anode height, and preparation of uniform Micro-bumps array. The blue Micro-LED display exhibits excellent electrical and optical characteristic with a low forward voltage of 3.45 V. Moreover, a 3D model of integrated Micro-LED-CMOS was built by theoretical simulation and the finite element analysis was employed to evaluate the reliability of the heterogeneous integration. Finally, we illustrated the great prospect of the fabricated Micro-LED as the light engine for lightweight AR and spatial light field display. © 2024 Elsevier Ltd

Keyword:

CMOS integrated circuits Indium phosphide Matrix algebra MOS devices MOSFET devices Semiconducting indium phosphide Silicon wafers Three dimensional integrated circuits

Community:

  • [ 1 ] [Li, Yang]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 2 ] [Li, Yang]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 3 ] [Zhang, Kaixin]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 4 ] [Zhang, Kaixin]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 5 ] [Zhi, Ting]College of Electronic and Optical Engineering & College of Flexible Electronics, Nanjing University of Posts and Telecommunications, Nanjing; 210023, China
  • [ 6 ] [Tao, Tao]Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering. Nanjing University, Nanjing; 210093, China
  • [ 7 ] [Huang, Chunlei]College of Material and Chemical Engineering, Minjiang University, Fuzhou; 350108, China
  • [ 8 ] [Nie, Junyang]TCL China Star Optoelectronics Technology Co., Ltd, Shenzhen; 518132, China
  • [ 9 ] [Yang, Tianxi]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 10 ] [Yang, Tianxi]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 11 ] [Zhou, Yijian]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 12 ] [Zhou, Yijian]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 13 ] [Huang, Zhonghang]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 14 ] [Huang, Zhonghang]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 15 ] [Lu, Yu]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 16 ] [Lu, Yu]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 17 ] [Luo, Canlin]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 18 ] [Luo, Canlin]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 19 ] [Yan, Qun]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 20 ] [Yan, Qun]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 21 ] [Sun, Jie]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 22 ] [Sun, Jie]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 23 ] [Guo, Tailiang]College of Physics and Information Engineering, Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou; 350100, China
  • [ 24 ] [Guo, Tailiang]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China

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Source :

Materials Science in Semiconductor Processing

ISSN: 1369-8001

Year: 2025

Volume: 188

4 . 2 0 0

JCR@2023

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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