Noble　singleatom　catalysts　have　rapidly　been　attracting　attention　due　to　their　unique　catalytic　properties　and　maximized　utilization.　Atomic　layer　deposition　(ALD)　is　an　emerging　powerful　technique　for　large-scale　synthesis　of　stable　single　atom.　In　this　review,　we　summarize　recent　developments　of　single　atom　synthesized　by　ALD　as　well　as　explore　future　research　direction　and　trends.　(C)　2017,　Dalian　Institute　of　Chemical　Physics,　Chinese　Academy　of　Sciences.　Published　by　Elsevier　B.V.　All　rights　reserved.