Carbon　nanotube　(CNT)/Ag/Al-doped　zinc　oxide　(AZO)　multilayer　films　are　fabricated　on　a　plastic　substrate　by　using　spraying　and　magnetron　sputtering　methods　at　room　temperature.　The　electrical　and　optical　properties　of　the　transparent　conductive　CNT/Ag/AZO　films　are　investigated.　The　introduction　of　Ag　and　AZO　layer　can　smoothen　the　surface,　and　improve　the　conductivity　and　optical　transmittance　of　the　multilayer　films.　The　Ag　thickness　is　optimized　by　estimating　the　figure　of　merit　of　the　films.　The　CNT/Ag/AZO　films　can　maintain　high　conductivity　and　transmittance　without　obvious　degradation　during　repeated　bending.　The　results　indicate　that　the　multilayer　films　have　potential　applications　in　flexible　optoelectronic　devices.　(c)　2012　Elsevier　B.V.　All　rights　reserved.