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author:

Liu, Zhiqiang (Liu, Zhiqiang.) [1] | Liu, Bingyao (Liu, Bingyao.) [2] | Ren, Fang (Ren, Fang.) [3] | Yin, Yue (Yin, Yue.) [4] | Zhang, Shuo (Zhang, Shuo.) [5] | Liang, Meng (Liang, Meng.) [6] | Dou, Zhipeng (Dou, Zhipeng.) [7] | Liu, Zhetong (Liu, Zhetong.) [8] | Yang, Shenyuan (Yang, Shenyuan.) [9] | Yan, Jianchang (Yan, Jianchang.) [10] | Wei, Tongbo (Wei, Tongbo.) [11] | Yi, Xiaoyan (Yi, Xiaoyan.) [12] | Wu, Chaoxing (Wu, Chaoxing.) [13] | Guo, Tailiang (Guo, Tailiang.) [14] (Scholars:郭太良) | Wang, Junxi (Wang, Junxi.) [15] | Zhang, Yong (Zhang, Yong.) [16] | Li, Jinmin (Li, Jinmin.) [17] | Gao, Peng (Gao, Peng.) [18]

Indexed by:

EI SCIE

Abstract:

The performance of nitride devices is strongly affected by their polarity. Understanding the polarity determination and evolution mechanism of polar wurtzite nitrides on nonpolar substrates is therefore critically important. This work confirms that the polarity of AlN on sapphire prepared by metal-organic chemical vapor deposition is not inherited from the nitrides/sapphire interface as widely accepted, instead, experiences a spontaneous polarity inversion during the growth. It is found that at the initial growth stage, the interface favors the nitrogen-polarity, rather than the widely accepted metal-polarity or randomly coexisting. However, the polarity subsequently converts into the metal-polar situation, at first locally then expanding into the whole area, driven by the anisotropy of surface energies, which results in universally existing inherent inverse grain boundaries. Furthermore, vertical two-dimensional electron accumulation originating from the lattice symmetry breaking at the inverse grain boundary is first revealed. This work identifies another cause of high-density defects in nitride epilayers, besides lattice mismatch induced dislocations. These findings also offer new insights into atomic structure and determination mechanism of polarity in nitrides, providing clues for its manipulation toward the novel hetero-polarity devices.

Keyword:

break-down votage interfaces metal-organic chemical vapor deposition (MOCVD) nitrides polarity

Community:

  • [ 1 ] [Liu, Zhiqiang]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 2 ] [Ren, Fang]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 3 ] [Yin, Yue]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 4 ] [Zhang, Shuo]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 5 ] [Liang, Meng]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 6 ] [Yan, Jianchang]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 7 ] [Wei, Tongbo]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 8 ] [Yi, Xiaoyan]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 9 ] [Wang, Junxi]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 10 ] [Li, Jinmin]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China
  • [ 11 ] [Liu, Zhiqiang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 12 ] [Ren, Fang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 13 ] [Yin, Yue]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 14 ] [Zhang, Shuo]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 15 ] [Liang, Meng]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 16 ] [Yang, Shenyuan]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 17 ] [Yan, Jianchang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 18 ] [Wei, Tongbo]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 19 ] [Yi, Xiaoyan]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 20 ] [Wang, Junxi]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 21 ] [Li, Jinmin]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
  • [ 22 ] [Liu, Bingyao]Peking Univ, Electron Microscopy Lab, Sch Phys, Beijing 100871, Peoples R China
  • [ 23 ] [Dou, Zhipeng]Peking Univ, Electron Microscopy Lab, Sch Phys, Beijing 100871, Peoples R China
  • [ 24 ] [Liu, Zhetong]Peking Univ, Electron Microscopy Lab, Sch Phys, Beijing 100871, Peoples R China
  • [ 25 ] [Gao, Peng]Peking Univ, Electron Microscopy Lab, Sch Phys, Beijing 100871, Peoples R China
  • [ 26 ] [Liu, Bingyao]Peking Univ, Int Ctr Quantum Mat, Sch Phys, Beijing 100871, Peoples R China
  • [ 27 ] [Dou, Zhipeng]Peking Univ, Int Ctr Quantum Mat, Sch Phys, Beijing 100871, Peoples R China
  • [ 28 ] [Liu, Zhetong]Peking Univ, Int Ctr Quantum Mat, Sch Phys, Beijing 100871, Peoples R China
  • [ 29 ] [Gao, Peng]Peking Univ, Int Ctr Quantum Mat, Sch Phys, Beijing 100871, Peoples R China
  • [ 30 ] [Liu, Bingyao]Beijing Graphene Inst BGI, Beijing 100095, Peoples R China
  • [ 31 ] [Dou, Zhipeng]Beijing Graphene Inst BGI, Beijing 100095, Peoples R China
  • [ 32 ] [Liu, Zhetong]Beijing Graphene Inst BGI, Beijing 100095, Peoples R China
  • [ 33 ] [Gao, Peng]Beijing Graphene Inst BGI, Beijing 100095, Peoples R China
  • [ 34 ] [Liu, Bingyao]Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
  • [ 35 ] [Liu, Zhetong]Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
  • [ 36 ] [Gao, Peng]Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
  • [ 37 ] [Yang, Shenyuan]Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
  • [ 38 ] [Wu, Chaoxing]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Fujian, Peoples R China
  • [ 39 ] [Guo, Tailiang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Fujian, Peoples R China
  • [ 40 ] [Zhang, Yong]Univ North Carolina Charlotte, Dept Elect & Comp Engn, Charlotte, NC 28223 USA
  • [ 41 ] [Gao, Peng]Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China
  • [ 42 ] [Gao, Peng]Peking Univ, Interdisciplinary Inst Light Element Quantum Mat, Beijing 100871, Peoples R China
  • [ 43 ] [Gao, Peng]Peking Univ, Res Ctr Light Element Adv Mat, Beijing 100871, Peoples R China

Reprint 's Address:

  • [Liu, Zhiqiang]Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Semicond Lighting Technol, Beijing 100083, Peoples R China;;[Liu, Zhiqiang]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China;;[Yang, Shenyuan]Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China;;[Gao, Peng]Peking Univ, Electron Microscopy Lab, Sch Phys, Beijing 100871, Peoples R China;;[Gao, Peng]Peking Univ, Int Ctr Quantum Mat, Sch Phys, Beijing 100871, Peoples R China;;[Gao, Peng]Beijing Graphene Inst BGI, Beijing 100095, Peoples R China;;[Gao, Peng]Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China;;[Zhang, Yong]Univ North Carolina Charlotte, Dept Elect & Comp Engn, Charlotte, NC 28223 USA;;[Gao, Peng]Collaborat Innovat Ctr Quantum Matter, Beijing 100871, Peoples R China;;[Gao, Peng]Peking Univ, Interdisciplinary Inst Light Element Quantum Mat, Beijing 100871, Peoples R China;;[Gao, Peng]Peking Univ, Res Ctr Light Element Adv Mat, Beijing 100871, Peoples R China

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Source :

SMALL

ISSN: 1613-6810

Year: 2022

Issue: 16

Volume: 18

1 3 . 3

JCR@2022

1 3 . 0 0 0

JCR@2023

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:91

JCR Journal Grade:1

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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