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author:

Wang, Linghua (Wang, Linghua.) [1] (Scholars:王凌华) | Zhu, Minmin (Zhu, Minmin.) [2] (Scholars:朱敏敏) | Shao, Yong (Shao, Yong.) [3] | Zhao, Yida (Zhao, Yida.) [4] | Wei, Can (Wei, Can.) [5] | Gao, Langfeng (Gao, Langfeng.) [6] | Bao, Yiping (Bao, Yiping.) [7]

Indexed by:

EI Scopus SCIE

Abstract:

Sensors that have low power consumption, high scalability and the ability of rapidly detecting multitudinous external stimulus are of great value in cyber-physical interactive applications. Herein, we reported the fabrication of ferroelectric barium strontium titanate ((Ba70Sr30)TiO3, BST) thin films on silicon substrates by magnetron sputtering. The as-grown BST films have a pure perovskite structure and exhibit excellent ferroelectric characteristics, such as a remnant polarization of 2.4 mu C/cm(2), a ferro-to-paraelectric (tetragonal-to-cubic) phase transition temperature of 31.2 degrees C, and a broad optical bandgap of 3.58 eV. Capacitor-based sensors made from the BST films have shown an outstanding average sensitivity of 0.10 mV center dot Pa-1 in the 10-80 kPa regime and work extremely steadily over 1000 cycles. More importantly, utilizing the Pockels effect, optical manipulation in BST can be also realized by a smaller bias and its electro-optic coefficient r(eff) is estimated to be 83.5 pmV(-1), which is 2.6 times larger than in the current standard material (LiNbO3) for electro-optical devices. Our work established BST thin film as a powerful design paradigm toward on-chip integrations with diverse electronics into sensors via CMOS-comparable technique.

Keyword:

barium strontium titanate force optical manipulation Pockels effect sensor

Community:

  • [ 1 ] [Wang, Linghua]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 2 ] [Zhu, Minmin]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 3 ] [Wei, Can]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 4 ] [Zhu, Minmin]Fuzhou Univ, FZU Jinjiang Joint Inst Microelect, Jinjiang Sci & Educ Pk, Jinjiang 362200, Peoples R China
  • [ 5 ] [Shao, Yong]Fuzhou Univ, FZU Jinjiang Joint Inst Microelect, Jinjiang Sci & Educ Pk, Jinjiang 362200, Peoples R China
  • [ 6 ] [Gao, Langfeng]Fuzhou Univ, FZU Jinjiang Joint Inst Microelect, Jinjiang Sci & Educ Pk, Jinjiang 362200, Peoples R China
  • [ 7 ] [Zhao, Yida]Nanyang Technol Univ, Sch Mat Sci & Engn, 50 Nanyang Ave, Singapore 639798, Singapore
  • [ 8 ] [Bao, Yiping]Acad Hitech Res, Hunan Inst Traff Engn, Hengyang 421099, Peoples R China

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SENSORS

ISSN: 1424-8220

Year: 2022

Issue: 19

Volume: 22

3 . 9

JCR@2022

3 . 4 0 0

JCR@2023

ESI Discipline: CHEMISTRY;

ESI HC Threshold:74

JCR Journal Grade:2

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 3

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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