• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
成果搜索

author:

Zhu, Minmin (Zhu, Minmin.) [1] (Scholars:朱敏敏) | Shao, Yong (Shao, Yong.) [2] | Xin, Yangmei (Xin, Yangmei.) [3] | Yang, Dan (Yang, Dan.) [4] (Scholars:杨丹) | Lu, Xiaoqiang (Lu, Xiaoqiang.) [5] (Scholars:卢孝强) | Zhang, Haizhong (Zhang, Haizhong.) [6] (Scholars:张海忠)

Indexed by:

EI Scopus SCIE

Abstract:

Mainstream high-k gate materials, such as SiO2, Al2O3, and HfZrO2, are in demand for modern electronics. However, these dielectrics possess lower thermal conductivity, significantly limiting thermal dissipation in electronic devices. Herein, we propose the utilization of complementary metal-oxide semiconductor- (CMOS) compatible high power impulse magnetron sputtering (HiPIMS) for the mass production of highly textured hexagonal boron nitride (h-BN) on (100)-, (110)-, and (111)-oriented SrTiO3 substrates. The as-prepared films exhibit distinct vertical alignments, as evidenced by HRTEM and FTIR analysis. Notably, the R value, ranging from 0.46 to 0.50, is associated with the stress in the film. Importantly, distinct anisotropies in thermal conductivity, dielectric constant, and optical band gap are observed. Furthermore, the values of thermal conductivity in these highly textured h-BN films are 4.5, 5.7, and 5.3 Wm- 1K-1, which is almost three times larger than those of SiO2 (1.4 Wm- 1K-1) and Al2O3 (1.35 Wm- 1K-1), and even an order of magnitude larger than that of HfZrO2 (0.67 Wm- 1K-1). The combination of excellent dielectric characteristics, favorable thermal conductivity, and superior stability over a broad temperature range makes this novel material outperform conventional dielectric gate materials in high-power electronics applications.

Keyword:

Boron nitride thin films Dielectric dispersion Highly textured HiPIMS Self-dissipating electronics Thermal conductivity

Community:

  • [ 1 ] [Zhu, Minmin]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 2 ] [Xin, Yangmei]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 3 ] [Yang, Dan]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 4 ] [Lu, Xiaoqiang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 5 ] [Zhang, Haizhong]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 6 ] [Zhu, Minmin]Fuzhou Univ, Sch Adv Mfg, Jinjiang Sci & Educ Pk, Jinjiang 362200, Peoples R China
  • [ 7 ] [Shao, Yong]Fuzhou Univ, Sch Adv Mfg, Jinjiang Sci & Educ Pk, Jinjiang 362200, Peoples R China
  • [ 8 ] [Zhang, Haizhong]Fuzhou Univ, Sch Adv Mfg, Jinjiang Sci & Educ Pk, Jinjiang 362200, Peoples R China

Reprint 's Address:

  • [Zhu, Minmin]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China;;[Zhang, Haizhong]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China;;

Show more details

Related Keywords:

Source :

VACUUM

ISSN: 0042-207X

Year: 2024

Volume: 225

3 . 8 0 0

JCR@2023

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

Online/Total:202/10039383
Address:FZU Library(No.2 Xuyuan Road, Fuzhou, Fujian, PRC Post Code:350116) Contact Us:0591-22865326
Copyright:FZU Library Technical Support:Beijing Aegean Software Co., Ltd. 闽ICP备05005463号-1