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author:

Wang, Xue-Yan (Wang, Xue-Yan.) [1] | Guo, Cheng-Long (Guo, Cheng-Long.) [2] | Zhou, Yi-Jian (Zhou, Yi-Jian.) [3] | Zhu, Xue-Qi (Zhu, Xue-Qi.) [4] | Yan, Zhi-Bing (Yan, Zhi-Bing.) [5] | Li, Yang (Li, Yang.) [6] | Yang, Tian-Xi (Yang, Tian-Xi.) [7] | Sun, Jie (Sun, Jie.) [8] | Yan, Qun (Yan, Qun.) [9]

Abstract:

In this paper, an AlGaInP-based red Micro-LED display measured 17.78 mm (0.7 in), with a resolution of 1920 x 1080, a light-emitting mesa size of 6 mu m, a pixel pitch of 8 mu m and a pixel density of 3175 PPI was designed and fabricated with a CMOS driver backplane. The metal bump preparation technology of the complementary metal-oxide semiconductor driver backplane was optimized to enhance the bonding yield and create an optimal display effect. Improper sizing of the etched window in the SiO2 insulation and passivation layer can have a detrimental impact on the metal bump preparation and subsequent bonding process. By optimizing the settings of lithography and dry etching, the appropriate size of the etched aperture in the passivation layer was achieved. The high density, small size, and large aspect ratio of the photoresist openings for the bump fabrication made it challenging to remove the photoresist following the metal evaporation. To successfully remove the photoresist, it is important to carefully choose suitable experimental conditions for the removal. Afterwards, an 8 mu m AlGaInP-based red Micro-LED display was effectively integrated with complementary metal-oxide semiconductor using flip-chip bonding technology. This work may be of reference value to those who work on ultrahigh density red Micro-LEDs that is challenging but crucial for future full color micro displays.

Keyword:

bonding CMOS photoresist stripping of the lift-off lithography red Micro-LED the etched PV aperture

Community:

  • [ 1 ] [Wang, Xue-Yan]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 2 ] [Guo, Cheng-Long]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 3 ] [Zhou, Yi-Jian]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 4 ] [Zhu, Xue-Qi]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 5 ] [Yan, Zhi-Bing]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 6 ] [Li, Yang]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 7 ] [Yang, Tian-Xi]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 8 ] [Sun, Jie]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 9 ] [Yan, Qun]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 10 ] [Wang, Xue-Yan]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 11 ] [Guo, Cheng-Long]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 12 ] [Zhou, Yi-Jian]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 13 ] [Zhu, Xue-Qi]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 14 ] [Yan, Zhi-Bing]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 15 ] [Li, Yang]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 16 ] [Yang, Tian-Xi]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 17 ] [Sun, Jie]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 18 ] [Yan, Qun]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 19 ] [Sun, Jie]Chalmers Univ Technol, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden

Reprint 's Address:

  • [Yang, Tian-Xi]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China;;[Sun, Jie]Fuzhou Univ, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China;;[Yang, Tian-Xi]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China;;[Sun, Jie]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China;;[Sun, Jie]Chalmers Univ Technol, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden;;

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Source :

ENGINEERING RESEARCH EXPRESS

ISSN: 2631-8695

Year: 2024

Issue: 4

Volume: 6

1 . 5 0 0

JCR@2023

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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