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author:

Tian, Liang (Tian, Liang.) [1] | Lin, Chang (Lin, Chang.) [2] | Pan, Kui (Pan, Kui.) [3] | Lu, Yu (Lu, Yu.) [4] | Deng, Liying (Deng, Liying.) [5] | Huang, Zhonghang (Huang, Zhonghang.) [6] | Yang, Tianxi (Yang, Tianxi.) [7] | Zhang, Yongai (Zhang, Yongai.) [8] (Scholars:张永爱) | Sun, Jie (Sun, Jie.) [9] (Scholars:孙捷) | Yan, Qun (Yan, Qun.) [10]

Indexed by:

EI Scopus SCIE

Abstract:

We propose that electroless plating is a superb approach to preparing metallic bumps with an ultrafine pitch for the integration of a micro light-emitting diode (micro-LED). Electroless plating does not suffer from lift-off-related issues, which are ubiquitous in thermal evaporation. Besides, it can result in much more uniform bumps than electroplating because the bump height is not affected by the current distribution. This study reports ultrafine pitch Ni/Au bumps fabricated by electroless nickel immersion gold (ENIG) plating. Furthermore, cheap metals iron and nickel are selected to catalyze the electroless nickel process. The results indicate that uniform and consistent Ni/Au bumps can be obtained through the iron sheet and nickel layer method. Besides, no voids and impurities are found inside the bumps, which is beneficial for the following interconnection process. Moreover, the change in Ni bump height values with the electroless plating time is also provided.

Keyword:

activation Au bumps electroless plating interconnection Ni ultrafine pitch

Community:

  • [ 1 ] [Tian, Liang]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 2 ] [Lin, Chang]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 3 ] [Pan, Kui]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 4 ] [Lu, Yu]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 5 ] [Deng, Liying]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 6 ] [Huang, Zhonghang]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 7 ] [Yang, Tianxi]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 8 ] [Zhang, Yongai]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 9 ] [Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 10 ] [Yan, Qun]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou 350100, Peoples R China
  • [ 11 ] [Lin, Chang]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 12 ] [Huang, Zhonghang]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 13 ] [Yang, Tianxi]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 14 ] [Zhang, Yongai]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 15 ] [Sun, Jie]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 16 ] [Yan, Qun]Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou 350100, Peoples R China
  • [ 17 ] [Sun, Jie]Chalmers Univ Technol, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden
  • [ 18 ] [Yan, Qun]Rich Sense Elect Technol Co Ltd, Quanzhou 362200, Peoples R China

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Source :

ACS APPLIED ELECTRONIC MATERIALS

ISSN: 2637-6113

Year: 2022

4 . 7

JCR@2022

4 . 4 0 0

JCR@2023

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:91

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 6

SCOPUS Cited Count: 7

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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