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author:

Xu, Xiaorui (Xu, Xiaorui.) [1] (Scholars:许晓锐) | Chen, Desen (Chen, Desen.) [2] | Lu, Yaoping (Lu, Yaoping.) [3] | Li, Titao (Li, Titao.) [4] (Scholars:李悌涛) | Han, Xueli (Han, Xueli.) [5] | Chen, Duanyang (Chen, Duanyang.) [6] | Qi, Hongji (Qi, Hongji.) [7] | Yang, Dan (Yang, Dan.) [8] (Scholars:杨丹) | Zhu, Minmin (Zhu, Minmin.) [9] (Scholars:朱敏敏) | Zhang, Haizhong (Zhang, Haizhong.) [10] (Scholars:张海忠) | Lu, Xiaoqiang (Lu, Xiaoqiang.) [11] (Scholars:卢孝强)

Indexed by:

EI Scopus SCIE

Abstract:

In this Letter, a high-quality and high-resistivity nitrogen (N)-doped Ga2O3 current blocking layer (CBL) is grown utilizing metal-organic chemical vapor deposition homoepitaxial technology. By using nitrous oxide (N2O) as oxygen source for Ga2O3 growth and N source for doping and controlling the growth temperature, the grown CBL can effectively achieve high (similar to 10(19) cm(-3)) or low (similar to 10(17) cm-3) N doping concentrations, as well as high crystal quality. Furthermore, the electrical properties of the developed CBL are verified at the device level, which shows that the device using the CBL can withstand bidirectional voltages exceeding 3.5 kV with very low leakage (<= 1 x 10(-4) A/cm2). This work can pave the way for the realization of high-voltage and low-leakage Ga2O3 vertical devices, especially metal-oxide-semiconductor field effect transistors.

Keyword:

Community:

  • [ 1 ] [Xu, Xiaorui]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 2 ] [Chen, Desen]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 3 ] [Lu, Yaoping]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 4 ] [Li, Titao]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 5 ] [Yang, Dan]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 6 ] [Zhu, Minmin]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 7 ] [Zhang, Haizhong]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 8 ] [Lu, Xiaoqiang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China
  • [ 9 ] [Han, Xueli]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Res Ctr Laser Crystal, Shanghai 201800, Peoples R China
  • [ 10 ] [Chen, Duanyang]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Res Ctr Laser Crystal, Shanghai 201800, Peoples R China
  • [ 11 ] [Qi, Hongji]Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Res Ctr Laser Crystal, Shanghai 201800, Peoples R China

Reprint 's Address:

  • [Li, Titao]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China;;[Zhang, Haizhong]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350116, Peoples R China;;

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Source :

APPLIED PHYSICS LETTERS

ISSN: 0003-6951

Year: 2024

Issue: 20

Volume: 125

3 . 5 0 0

JCR@2023

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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