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author:

Su Hao (Su Hao.) [1] | Li Wen-hao (Li Wen-hao.) [2] | Li Jun-long (Li Jun-long.) [3] | Liu Hui (Liu Hui.) [4] | Wang Kun (Wang Kun.) [5] | Zhang Yong-ai (Zhang Yong-ai.) [6] (Scholars:张永爱) | Zhou Xiong-tu (Zhou Xiong-tu.) [7] (Scholars:周雄图) | Wu Chao-xing (Wu Chao-xing.) [8] (Scholars:吴朝兴) | Guo Tai-liang (Guo Tai-liang.) [9] (Scholars:郭太良)

Indexed by:

ESCI Scopus PKU CSCD

Abstract:

With the continuous progress in the manufacturing process of gallium nitride (GaN)-based light-emitting diodes (LEDs), Micro-LED display is considered as an emerging display technology, which has broad prospects for near-eye display, large-scale displays device, flexible display, and other fields. The inspection of wafer-level Micro-LED chips can improve the yield of the screens and reduce the manufacturing cost of displayers, which is one of the key technologies related to Micro-LED display. For the inspection needs of large quantity (millions of orders) and small size (< 50 mu m) of wafer-level Micro-LED chip arrays, the existing electrical inspection technology has the disadvantages of low inspection efficiency and high cost. Therefore, Micro-LED chips inspection technology with improving inspection efficiency, improving inspection accuracy, and reducing inspection cost is the future development trend. In this paper, several indicators required for Micro-LED chip inspection are summarized. Then, the existing or proposed inspection methods are introduced and analyzed in detail. Finally, the future development of inspection technology is prospected.

Keyword:

contact inspection defect inspection Micro-LED non-contact inspection

Community:

  • [ 1 ] [Su Hao]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 2 ] [Li Wen-hao]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 3 ] [Li Jun-long]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 4 ] [Wang Kun]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 5 ] [Zhang Yong-ai]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 6 ] [Zhou Xiong-tu]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 7 ] [Wu Chao-xing]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 8 ] [Guo Tai-liang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350108, Peoples R China
  • [ 9 ] [Liu Hui]Fujian Jiangxia Univ, Coll Elect Informat Sci, Fuzhou 350108, Peoples R China
  • [ 10 ] [Zhang Yong-ai]Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350108, Peoples R China
  • [ 11 ] [Zhou Xiong-tu]Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350108, Peoples R China
  • [ 12 ] [Wu Chao-xing]Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350108, Peoples R China
  • [ 13 ] [Guo Tai-liang]Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350108, Peoples R China

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Source :

CHINESE JOURNAL OF LIQUID CRYSTALS AND DISPLAYS

ISSN: 1007-2780

CN: 22-1259/O4

Year: 2023

Issue: 5

Volume: 38

Page: 582-594

0 . 7

JCR@2023

0 . 7 0 0

JCR@2023

JCR Journal Grade:3

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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