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Abstract:
With the continuous progress in the manufacturing process of gallium nitride (GaN)-based light-emitting diodes (LEDs), Micro-LED display is considered as an emerging display technology, which has broad prospects for near-eye display, large-scale displays device, flexible display, and other fields. The inspection of wafer-level Micro-LED chips can improve the yield of the screens and reduce the manufacturing cost of displayers, which is one of the key technologies related to Micro-LED display. For the inspection needs of large quantity (millions of orders) and small size (< 50 mu m) of wafer-level Micro-LED chip arrays, the existing electrical inspection technology has the disadvantages of low inspection efficiency and high cost. Therefore, Micro-LED chips inspection technology with improving inspection efficiency, improving inspection accuracy, and reducing inspection cost is the future development trend. In this paper, several indicators required for Micro-LED chip inspection are summarized. Then, the existing or proposed inspection methods are introduced and analyzed in detail. Finally, the future development of inspection technology is prospected.
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CHINESE JOURNAL OF LIQUID CRYSTALS AND DISPLAYS
ISSN: 1007-2780
CN: 22-1259/O4
Year: 2023
Issue: 5
Volume: 38
Page: 582-594
0 . 7
JCR@2023
0 . 7 0 0
JCR@2023
JCR Journal Grade:3
CAS Journal Grade:4
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 0
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